Low Capacity Flowmeters and Controllers

(from 0-10sccm to 0-30slpm)

HFM200 / HFC202

Features

• ±1% of Full-Scale Accuracy
• Standard Size
• More Ranges
• Higher Pressures
• Proven Reliability
• Range — 10 to 30,000 SCCM (N 2 Equivalent)

Applications

• Leak Testing
• Medical Research
• Vapour Deposition
• R&D and Process Flows
• Semiconductor Processes
• Pollution Monitoring
• Gas Blending
• Chromatography

Design Features
The HFM/HFC Series of flow instruments is based on a modular design. At the heart of each instrument is an insulated thermoelectric sensor which provides enhanced zero stability and allows installation in any orientation plane. This sensor is designed to be removable/replaceable in the field to virtually eliminate long down time due to clogging, the most common cause of failure in the industry. Additionally, the HFM/HFC design features an integral filter and an easily replaceable closed loop electronics card.* The HFC also features an externally adjustable valve with easily replaceable flow orifices.

All of these standard features, when coupled with the instruments inherent linear response to flow changes and Hastings Instruments' long-proven reputation for quality, result in the finest flowmeters and flow controllers available today.
*Note: After changing components, instruments require recalibration to meet accuracy specifications.

Optional Features

• Fittings
• O Ring seals
• Enhanced response time
• Enhanced flow stability
• High pressure rating (1500 PSIG)
• 4-20 mA converters
• Cleaned for oxygen service

Accessories

• Power supplies/readouts
• Flow totalisers
• Alarm set points
• Interconnecting cables

*Viton® is a registered trademark of Dupont Performance Elastomers