High Accuracy Flowmeters and Controllers

(from 0-5sccm to 0-30,000sccm)

HFM-300 / HFC-302

Features

• ±0.75% of Full-Scale Accuracy @ 3 Sigma
• All-metal Seals
• Settling Times: HFM-300 ² 0.50 sec HFC-302 ² 0.75 sec
• Range 5 to 30,000 sccm (N 2 Equivalent)
• Large Diameter Sensor Tube
• Low Wetted Surface Area
• Operating Pressures to 500 psi or higher
• NIST or UKAS Traceable Calibration

Applications

• Leak Testing
• Research
• Vapour Deposition
• R&D and Process Flows
• Semiconductor Processes
• Pollution Monitoring
• Gas Blending
• Chromatography

Design Features
Hastings Instruments products represent over 50 years of experience in the design and manufacture of mass flow products. The all-metal seal 300 Series Metaline is a culmination of this experience with patented technologies that make these instruments the finest flowmeters and controllers available today.

The Hastings Mass Flow 300 Metaline Series meters and controllers are designed to accurately measure mass flow without corrections or compensations for gas pressure and temperature. They are accurate to better than ±0.75% at 3 sigma. Hastings mass flow instruments do not require any periodic maintenance under normal operating conditions with clean gases. No damage will occur from the use of moderate overpressures (~500 psi) or overflows. Instruments are normally calibrated with the appropriate standard calibration gas (nitrogen), then a correction factor is used to adjust the output for the intended gas. Special calibrations for other gases, such as oxygen, helium and argon, are available upon special order.

These products contain a number of features that set them apart from other available instruments: (1) They are inherently linear; no linearisation circuitry is employed. Should recalibration in the field be desired (a calibration standard is required), the customer needs to simply set the zero and span points. (2) The output signal is linear for very large overflows and will not come back on scale when a flow an order of magnitude over the full scale flow rate is measured. (3) The HFM-300 incorporates a removable/replaceable sensor module.