Barocel ® Temperature Controlled Vacuum/Pressure Transducer
Model 655 / 658 / 659
The 655 Series of Barocel transducers employs a number of new proprietary design features to enhance reliability and performance in today's demanding applications. The sensing cell utilizes a unique diaphragm design and stitch welding process, and a new sensing cavity geometry which provides enhanced resistance to particulate contamination resulting in greater stability and reliability.
Performance is further improved by isolating the sensor in a patented, temperature controlled, hermetically sealed enclosure which neutralizes the effects of barometric pressure, humidity and ambient temperature changes. The result is a transducer offering long term stability which is an order of magnitude better than some previously available.
The features of the 655 Series make it ideal for use in vacuum systems where zero stability and resistance to process contamination are critical to successful runs. Only Inconel and Monel surfaces are exposed to the pressure medium and all welded joints are designed to permit rapid degassing. There is no loss of accuracy due to changes in gas composition or the presence of electrically conductive gases. A by-product of the hermetic enclosure is that it provides true, secondary containment of the process medium.
The Model 655 operates at 45°C and is ideal for most general vacuum and semiconductor processes.
The Model 658 operates at 100°C and is suited for those processes having condensable by-products such as in CVD and some Etch processes.
The Model 659 is temperature controlled at 123°C which is required for high temperature semiconductor processes and also meets with FDA requirements for steam sterilization for freeze drying in the food and pharmaceutical industries.
Typical Applications
Plasma Deposition
Sputtering
RTP
Industrial CVD
Crystal Growing
Plasma Etch'
PVD
Ion Implantation
LPCVD
Freeze Dryers
Wide Measuring Range Full four decade measurement
High Resolution Better than 0.005% of FS
True Total Pressure Calibration and measurement independent of gas compositi on
High Accuracy 0.15% of reading
Temperature Controlled Internal temperature maintained at 45, I 00, or I 23°C depending on the model selected
Improved zero stability: Better than 0.002% FS/°C
High Level DC Output 0 to 10 volts DC Full Scale
Standard Ranges:
0-50, 0-100 mTorr 0-1, 0-2, 0-5, 0-10, 0-100 Torr mbar & optional ranges are also available
Ambient Relative:
Humidity Effects: (0-95% RH)
<0.005% of FS
Accuracy:
0.15% of reading + 0.005% of FS
Overpressure Limit:
45 PSIA
Repeatability:
±0.01% of FS
Leak Rate to Ambient:
< I x 10-10 std cc/sec at 760 Torr applied pressure
Resolution:
0.005% of FS
Internal Volume:
8.33 cc including 1/2" OD tube
Warm up Time:
2 hours
Materials Exposed to Pressure Media:
Inconel, Monel
(See fitting options for other materials)
Heater Temperature:
655 - 45°C
658 - 100°C
659 - 123°C
Power Required:
+ 15 VDC + 5% regulated to 1%
655 - 250mA maximum
658 - 500mA maximum
659 - 700mA maximum
Ambient Operating Temperature:
655 - 15 - 40°C
658 - 15 - 70°C
659 - 15 - 70°C
Output Signal:
0 - 10 VDC, linear with pressure
Storage Temperature:
-45 to + 85°C
Output Impedance:
<0.1ohms
Temperature Effect on Zero:
> I Torr FS = <0.002% of FS/°C
< I Torr FS = <0.005% of FS/°C
Output Noise:
(0 - 2 KHz)
<0.002% of FS rms.
Temperature Effect on Sensitivity:
<0.02% of reading/°C
Fittings:
(other optional fittings are available)
1/2" OD Tube standard
NW 16 (316SS)
Cajon 8 VCR Female (316SS)
Cajon 8 VCO Female (316SS)
Tri-Clover (316SS)
Barometric Pressure Effects:
<0.005% of FS/760 Torr
Weight:
1.2 lb (.55 Kg)
Displays and Controllers for use with the model 655
모델명 : Model 655 / 658 / 659
