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Capacitance Manometers
Capacitance Manometers
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Barocel ¢ç Bakeable Vacuum/Pressure Transducer

Model 622

The Barocel 622 is field proven bakeable capacitance manometer vacuum/pressure transducer. The signal conditioning electronic components are separated from the sensor, allowing it to be operated at 200¡ÆC as required by some applications. Among these applications are processes involving condensable gases, some nuclear processes, and those requiring high temperature sterilization.

The sensor employs the same high performance features found in the Model 600. A temperature sensor within the transducer head provides zero sensitivity compensation to maintain accuracy over a wide temperature range. Removable connectors at the electronics package help simplify installation. An integral vacuum reference of all-welded construction contains gettering material to ensure long term stability and eliminates the need for reference vacuum pumps.

In vacuum systems, the Model 622 is the solution where traditional instruments such as McLeod, Pirani, or thermocouple gauges are unable to operate. Since pressure is sensed by displacement of a thin metal membrane, calibration accuracy is unaffected by the chemical composition of input media.

Dirty, corrosive and radioactive gases such as tritium may be monitored without affecting accuracy because the electrically active portion of the sensor is contained in the sealed vacuum reference which is isolated by the taut metal diaphragm.

The transducer's analogue output is linearly proportional to pressure, and may be recorded by data acquisition systems, read directly on a high-resolution digital voltmeter, or by Edwards power supply/readouts.

  • Sensor bakeable and operable to 200¡ÆC
  • High accuracy
    0.15% of reading
  • Small overpressure effect
    repeats within 0.01% full scale after being exposed to 35 psia
  • Stable zero reference
  • Fully temperature compensated
  • High resolution to better than
    0.01% full scale
  • True total pressure
    reading independent of gas composition
  • High level DC output
    0-10 volts, full scale

 

Pressure ranges:

0-10, 0-100, 0-1000 torr 0-10, 0-1000, 0-1000 mbar Ranges to 10,000 torr also available

Overpressure effect:

Repeats within 0.01% full scale after 35 psia exposure

Accuracy:

0.15% of reading standard, 0.5% of reading also available

Material exposed to pressure media:

Inconel and Monel

Resolution:

Better then 1:10 4

Internal volume:

8.3 cm 3 including 1/2¡± dia. tube

Operating temperature:

0 to 200¡ÆC (sensor)
0 to 65¡ÆC (signal conditioner)

Time constant:

8 msec

Temperature effect on zero:

Less than 0.005% full scale /¡ÆC

Output signal:

0-10 VDC, linear with pressure

Temperature effect on sensitivity:

Less than 0.02% reading /¡ÆC

Power requirements:

15 VDC ¡¾5% regulated to
¡¾ l % at 30mA

Overpressure without damage:

1.25 times full scale range or 35 psia, whichever is greater

RFI suppression:

Standard on all models

Weight:

2.9 lb (1.3 kg)

 

Displays and Controllers for use with the model 622